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2Ch 150℃ Heat Exchanger

Application
CVD, ALD, PE CVD, PE ALD
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Heating Type
Non contact with coolant
  • Item Specification Remark
    1CH 2CH
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Temp. Range 40 ~ 150℃ 40 ~ 150℃ Return PV Max.180℃
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control
    Cooling Capacity 20kW @ 150℃ 20kW @ 150℃ Not Fixed
    Heating Capacity 4kW @ 40℃ 4kW @ 40℃ Power Input : 8kW, 220V
    Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ -
    Coolant HT-270 HT-270 -
    Coolant Charge Volume 17ℓ -
    Footprint 420(W) x 490(D) x 1,215(H) / Utility : 160(D) -
    Weight Color LCD Touch Panel / PLC -
    Communication User Interface -

2Ch 230℃ Heat Exchanger

Application
CVD, ALD, PE CVD, PE ALD
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Heating Type
Non contact with coolant
  • Item Specification Remark
    1CH 2CH
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Flow Cycle Type Closed Cycle(No need Reservoir) Closed Cycle(No need Reservoir) -
    Temp. Range 40 ~ 230℃ 40 ~ 230℃ -
    Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control
    Cooling Capacity 20kW @ 200℃ 20kW @ 200℃ Not Fixed
    Heating Capacity 4kW @ 40℃ 4kW @ 40℃ -
    Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ -
    Coolant HT-270 HT-270 -
    Coolant Charge Volume 17ℓ * 2ea -
    Footprint 460(W) x 1203(D) x 1,185(H) Not Fixed
    Weight About 200kg Not Fixed
    Display / Control Color LCD Touch Panel / PLC -
    Communication User Spec. -
    Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A

Electric Switching Type Chiller

Application
Dry Etch
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Temp Control
Rapid temp up and down(2℃/sec) Peltier electric module
  • Item Specification Remark
    1CH 2CH
    Cooling type Electric Cooling Heat Exchanger Water Cooled
    Temp. Range -10℃ ~ +90℃ 30℃ ~ 80℃ -
    Temp. Accuracy ±0.1℃ ±0.1℃ At idle
    Cooling Capacity 8000W @ +20℃ 6000W @ +50℃ At supply control
    Max Flow Rate 20LPM / 0.3MPa 20LPM / 0.3MPa -
    Reservoir Volume 14.5Liter 14Liter -
    Coolant Galden or Fluorinert Galden or Fluorinert *. User Spec.
    Control Sensor Pt 100Ω Supply/Return
    Footprint 680(W) x 800(D) x 475(H) With Caster
    Weight 120kg -
    Display Touch Screen -
    Data Connector RS-485 *. User Option
    Electric Power 208~220VAC, 3Ph 4wire, 60Hz, 21.2kW Main ELB : 75A

Hybrid Type Chiller

Application
Dry Etch
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Temp Control
Refrigeration
  • Item Specification Remark
    1CH 2CH
    Cooling type Refrigeration System Heat Exchanger System -
    Temp. Range -20℃ ~ +80℃ 30℃ ~ 80℃ -
    Temp. Accuracy ±0.1℃ (Idle), ±0.2℃ (Load) ±0.1℃ (Idle), ±0.2℃ (Load) Supply Control
    Cooling Capacity 6kW @ -20℃ 6kW @ 30℃ -
    Heating Capacity 3kW @ 20℃ 6kW @ 30℃ -
    Max Flow Rate 25LPM, 0.3Mpa 25LPM, 0.3Mpa -
    Coolant FC-3282 FC-3282 -
    Coolant Charge Volume 20ℓ 20ℓ -
    Footprint 540(W) x 930(D) x 1600(H) -
    Weight 300kg -
    Display / Control Color LCD Touch Panel / PLC -
    Communication User Interface -
    Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
Heat Exchanger & Chiller
Heat Exchanger & Chiller
info



2Ch 150℃ Heat Exchanger

Application
CVD, ALD, PE CVD, PE ALD
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Heating Type
Non contact with coolant
  • Item Specification Remark
    1CH 2CH
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Temp. Range 40 ~ 150℃ 40 ~ 150℃ Return PV Max.180℃
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control
    Cooling Capacity 20kW @ 150℃ 20kW @ 150℃ Not Fixed
    Heating Capacity 4kW @ 40℃ 4kW @ 40℃ Power Input : 8kW, 220V
    Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ -
    Coolant HT-270 HT-270 -
    Coolant Charge Volume 17ℓ -
    Footprint 420(W) x 490(D) x 1,215(H) / Utility : 160(D) -
    Weight Color LCD Touch Panel / PLC -
    Communication User Interface -

2Ch 230℃ Heat Exchanger

Application
CVD, ALD, PE CVD, PE ALD
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Heating Type
Non contact with coolant
  • Item Specification Remark
    1CH 2CH
    Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System
    Flow Cycle Type Closed Cycle(No need Reservoir) Closed Cycle(No need Reservoir) -
    Temp. Range 40 ~ 230℃ 40 ~ 230℃ -
    Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control
    Cooling Capacity 20kW @ 200℃ 20kW @ 200℃ Not Fixed
    Heating Capacity 4kW @ 40℃ 4kW @ 40℃ -
    Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ -
    Coolant HT-270 HT-270 -
    Coolant Charge Volume 17ℓ * 2ea -
    Footprint 460(W) x 1203(D) x 1,185(H) Not Fixed
    Weight About 200kg Not Fixed
    Display / Control Color LCD Touch Panel / PLC -
    Communication User Spec. -
    Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A

Electric Switching Type Chiller

Application
Dry Etch
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Temp Control
Rapid temp up and down(2℃/sec) Peltier electric module
  • Item Specification Remark
    1CH 2CH
    Cooling type Electric Cooling Heat Exchanger Water Cooled
    Temp. Range -10℃ ~ +90℃ 30℃ ~ 80℃ -
    Temp. Accuracy ±0.1℃ ±0.1℃ At idle
    Cooling Capacity 8000W @ +20℃ 6000W @ +50℃ At supply control
    Max Flow Rate 20LPM / 0.3MPa 20LPM / 0.3MPa -
    Reservoir Volume 14.5Liter 14Liter -
    Coolant Galden or Fluorinert Galden or Fluorinert *. User Spec.
    Control Sensor Pt 100Ω Supply/Return
    Footprint 680(W) x 800(D) x 475(H) With Caster
    Weight 120kg -
    Display Touch Screen -
    Data Connector RS-485 *. User Option
    Electric Power 208~220VAC, 3Ph 4wire, 60Hz, 21.2kW Main ELB : 75A

Hybrid Type Chiller

Application
Dry Etch
Strength
Minimal size / Easy Operating / Powerful safety Interlock
Temp Control
Refrigeration
  • Item Specification Remark
    1CH 2CH
    Cooling type Refrigeration System Heat Exchanger System -
    Temp. Range -20℃ ~ +80℃ 30℃ ~ 80℃ -
    Temp. Accuracy ±0.1℃ (Idle), ±0.2℃ (Load) ±0.1℃ (Idle), ±0.2℃ (Load) Supply Control
    Cooling Capacity 6kW @ -20℃ 6kW @ 30℃ -
    Heating Capacity 3kW @ 20℃ 6kW @ 30℃ -
    Max Flow Rate 25LPM, 0.3Mpa 25LPM, 0.3Mpa -
    Coolant FC-3282 FC-3282 -
    Coolant Charge Volume 20ℓ 20ℓ -
    Footprint 540(W) x 930(D) x 1600(H) -
    Weight 300kg -
    Display / Control Color LCD Touch Panel / PLC -
    Communication User Interface -
    Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
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