Business Areas
Business
홈
- Business Areas
- Thermal Fluid
- Heat Exchanger & Chiller
2Ch 150℃ Heat Exchanger
- Application
- CVD, ALD, PE CVD, PE ALD
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Heating Type
- Non contact with coolant
-
Item Specification Remark 1CH 2CH Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Temp. Range 40 ~ 150℃ 40 ~ 150℃ Return PV Max.180℃ Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control Cooling Capacity 20kW @ 150℃ 20kW @ 150℃ Not Fixed Heating Capacity 4kW @ 40℃ 4kW @ 40℃ Power Input : 8kW, 220V Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ - Coolant HT-270 HT-270 - Coolant Charge Volume 17ℓ - Footprint 420(W) x 490(D) x 1,215(H) / Utility : 160(D) - Weight Color LCD Touch Panel / PLC - Communication User Interface -
2Ch 230℃ Heat Exchanger
- Application
- CVD, ALD, PE CVD, PE ALD
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Heating Type
- Non contact with coolant
-
Item Specification Remark 1CH 2CH Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Flow Cycle Type Closed Cycle(No need Reservoir) Closed Cycle(No need Reservoir) - Temp. Range 40 ~ 230℃ 40 ~ 230℃ - Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control Cooling Capacity 20kW @ 200℃ 20kW @ 200℃ Not Fixed Heating Capacity 4kW @ 40℃ 4kW @ 40℃ - Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ - Coolant HT-270 HT-270 - Coolant Charge Volume 17ℓ * 2ea - Footprint 460(W) x 1203(D) x 1,185(H) Not Fixed Weight About 200kg Not Fixed Display / Control Color LCD Touch Panel / PLC - Communication User Spec. - Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
Electric Switching Type Chiller
- Application
- Dry Etch
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Temp Control
- Rapid temp up and down(2℃/sec) Peltier electric module
-
Item Specification Remark 1CH 2CH Cooling type Electric Cooling Heat Exchanger Water Cooled Temp. Range -10℃ ~ +90℃ 30℃ ~ 80℃ - Temp. Accuracy ±0.1℃ ±0.1℃ At idle Cooling Capacity 8000W @ +20℃ 6000W @ +50℃ At supply control Max Flow Rate 20LPM / 0.3MPa 20LPM / 0.3MPa - Reservoir Volume 14.5Liter 14Liter - Coolant Galden or Fluorinert Galden or Fluorinert *. User Spec. Control Sensor Pt 100Ω Supply/Return Footprint 680(W) x 800(D) x 475(H) With Caster Weight 120kg - Display Touch Screen - Data Connector RS-485 *. User Option Electric Power 208~220VAC, 3Ph 4wire, 60Hz, 21.2kW Main ELB : 75A
Hybrid Type Chiller
- Application
- Dry Etch
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Temp Control
- Refrigeration
-
Item Specification Remark 1CH 2CH Cooling type Refrigeration System Heat Exchanger System - Temp. Range -20℃ ~ +80℃ 30℃ ~ 80℃ - Temp. Accuracy ±0.1℃ (Idle), ±0.2℃ (Load) ±0.1℃ (Idle), ±0.2℃ (Load) Supply Control Cooling Capacity 6kW @ -20℃ 6kW @ 30℃ - Heating Capacity 3kW @ 20℃ 6kW @ 30℃ - Max Flow Rate 25LPM, 0.3Mpa 25LPM, 0.3Mpa - Coolant FC-3282 FC-3282 - Coolant Charge Volume 20ℓ 20ℓ - Footprint 540(W) x 930(D) x 1600(H) - Weight 300kg - Display / Control Color LCD Touch Panel / PLC - Communication User Interface - Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
- Heat Exchanger & Chiller
- info
2Ch 150℃ Heat Exchanger
- Application
- CVD, ALD, PE CVD, PE ALD
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Heating Type
- Non contact with coolant
-
Item Specification Remark 1CH 2CH Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Temp. Range 40 ~ 150℃ 40 ~ 150℃ Return PV Max.180℃ Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control Cooling Capacity 20kW @ 150℃ 20kW @ 150℃ Not Fixed Heating Capacity 4kW @ 40℃ 4kW @ 40℃ Power Input : 8kW, 220V Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ - Coolant HT-270 HT-270 - Coolant Charge Volume 17ℓ - Footprint 420(W) x 490(D) x 1,215(H) / Utility : 160(D) - Weight Color LCD Touch Panel / PLC - Communication User Interface -
2Ch 230℃ Heat Exchanger
- Application
- CVD, ALD, PE CVD, PE ALD
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Heating Type
- Non contact with coolant
-
Item Specification Remark 1CH 2CH Cooling type Heat Exchanger System Heat Exchanger System Water Cooling System Flow Cycle Type Closed Cycle(No need Reservoir) Closed Cycle(No need Reservoir) - Temp. Range 40 ~ 230℃ 40 ~ 230℃ - Temp. Accuracy ±0.1℃ ( Idle ) ±0.1℃ ( Idle ) Supply Control Cooling Capacity 20kW @ 200℃ 20kW @ 200℃ Not Fixed Heating Capacity 4kW @ 40℃ 4kW @ 40℃ - Max Flow Rate 15LPM, 0.4Mpa, 150℃ 15LPM, 0.4Mpa, 150℃ - Coolant HT-270 HT-270 - Coolant Charge Volume 17ℓ * 2ea - Footprint 460(W) x 1203(D) x 1,185(H) Not Fixed Weight About 200kg Not Fixed Display / Control Color LCD Touch Panel / PLC - Communication User Spec. - Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
Electric Switching Type Chiller
- Application
- Dry Etch
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Temp Control
- Rapid temp up and down(2℃/sec) Peltier electric module
-
Item Specification Remark 1CH 2CH Cooling type Electric Cooling Heat Exchanger Water Cooled Temp. Range -10℃ ~ +90℃ 30℃ ~ 80℃ - Temp. Accuracy ±0.1℃ ±0.1℃ At idle Cooling Capacity 8000W @ +20℃ 6000W @ +50℃ At supply control Max Flow Rate 20LPM / 0.3MPa 20LPM / 0.3MPa - Reservoir Volume 14.5Liter 14Liter - Coolant Galden or Fluorinert Galden or Fluorinert *. User Spec. Control Sensor Pt 100Ω Supply/Return Footprint 680(W) x 800(D) x 475(H) With Caster Weight 120kg - Display Touch Screen - Data Connector RS-485 *. User Option Electric Power 208~220VAC, 3Ph 4wire, 60Hz, 21.2kW Main ELB : 75A
Hybrid Type Chiller
- Application
- Dry Etch
- Strength
- Minimal size / Easy Operating / Powerful safety Interlock
- Temp Control
- Refrigeration
-
Item Specification Remark 1CH 2CH Cooling type Refrigeration System Heat Exchanger System - Temp. Range -20℃ ~ +80℃ 30℃ ~ 80℃ - Temp. Accuracy ±0.1℃ (Idle), ±0.2℃ (Load) ±0.1℃ (Idle), ±0.2℃ (Load) Supply Control Cooling Capacity 6kW @ -20℃ 6kW @ 30℃ - Heating Capacity 3kW @ 20℃ 6kW @ 30℃ - Max Flow Rate 25LPM, 0.3Mpa 25LPM, 0.3Mpa - Coolant FC-3282 FC-3282 - Coolant Charge Volume 20ℓ 20ℓ - Footprint 540(W) x 930(D) x 1600(H) - Weight 300kg - Display / Control Color LCD Touch Panel / PLC - Communication User Interface - Electric Power 200~220VAC, 3Ph, 60Hz, 4Wire, 20kW Main Breaker : 75A
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