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PVD coating Technology
Characteristics
  • Material: Al2O3, Y2O3, AlF
  • Pure Ceramic Coating Formation
  • Replacing AlF3 Coating, Anodizing + NPC technology is being applied Fluorine Response Reduction Effect Site Verification
  • Out-gassing effect on the film surface
  • Parts applied: Semiconductor plate parts (heater, shower head, etc.)
  • Al2O3 coating cross-section SEM image
Al2O3 Coating Verification Evaluation Results
  • Sortation Surface Image (x3,000) Surface EDX Data →NF3 Remote Plasma Cln 200cycle
    Anodizing
    Anodizing +
    NPC
PVD
PVD
info
PVD coating Technology
Characteristics
  • Material: Al2O3, Y2O3, AlF
  • Pure Ceramic Coating Formation
  • Replacing AlF3 Coating, Anodizing + NPC technology is being applied Fluorine Response Reduction Effect Site Verification
  • Out-gassing effect on the film surface
  • Parts applied: Semiconductor plate parts (heater, shower head, etc.)
  • Al2O3 coating cross-section SEM image
Al2O3 Coating Verification Evaluation Results
  • Sortation Surface Image (x3,000) Surface EDX Data →NF3 Remote Plasma Cln 200cycle
    Anodizing
    Anodizing +
    NPC
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