Business Areas
Business
홈
- Business Areas
- Special Coating
- PVD
PVD coating Technology
Characteristics
- Material: Al2O3, Y2O3, AlF
- Pure Ceramic Coating Formation
- Replacing AlF3 Coating, Anodizing + NPC technology is being applied Fluorine Response Reduction Effect Site Verification
- Out-gassing effect on the film surface
- Parts applied: Semiconductor plate parts (heater, shower head, etc.)
-
- Al2O3 coating cross-section SEM image
-
Al2O3 Coating Verification Evaluation Results
-
Sortation Surface Image (x3,000) Surface EDX Data →NF3 Remote Plasma Cln 200cycle Anodizing 
Anodizing +
NPC
- PVD
- info
PVD coating Technology
Characteristics
- Material: Al2O3, Y2O3, AlF
- Pure Ceramic Coating Formation
- Replacing AlF3 Coating, Anodizing + NPC technology is being applied Fluorine Response Reduction Effect Site Verification
- Out-gassing effect on the film surface
- Parts applied: Semiconductor plate parts (heater, shower head, etc.)
-
- Al2O3 coating cross-section SEM image
-
Al2O3 Coating Verification Evaluation Results
-
Sortation Surface Image (x3,000) Surface EDX Data →NF3 Remote Plasma Cln 200cycle Anodizing Anodizing +
NPC
- detail_img
-