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Special Coating
ALD

ALD

ALD Technology
ALD Technology Features Pore Sealing for Anodizing Film, Barrier Coating for Metal Contamination
  • Possesses 300mm ALD System and 6G-class ALD System
  • Material: Al2O3, YAG, AlF3 coating available
  • Base film type Withstand voltage Corrosion resistance
    Ref. [V] ALD 100nm stacking [V] Ref. [mm:ss] ALD 100nm stacking [mm:ss]
    AI Bare 0 6 00:22 (HCl 10%) 04:46 (HCl 10%)
    AI Bare 188 274 03:36 (HCl 30%) 1hr or more (30% HCl)
    Anodizing2 5㎛ 178 302 04:35 (HCl 30%) 1hr or more (30% HCl)
Anodizing Surface ALD images before / after coatin
  • Anodizing
  • + ALD 100nm
  • Plate ALD Results
  • 300mm ALD system
  • 6G ALD system
ALD
ALD
info
ALD Technology
ALD Technology Features Pore Sealing for Anodizing Film, Barrier Coating for Metal Contamination
  • Possesses 300mm ALD System and 6G-class ALD System
  • Material: Al2O3, YAG, AlF3 coating available
  • Base film type Withstand voltage Corrosion resistance
    Ref. [V] ALD 100nm stacking [V] Ref. [mm:ss] ALD 100nm stacking [mm:ss]
    AI Bare 0 6 00:22 (HCl 10%) 04:46 (HCl 10%)
    AI Bare 188 274 03:36 (HCl 30%) 1hr or more (30% HCl)
    Anodizing2 5㎛ 178 302 04:35 (HCl 30%) 1hr or more (30% HCl)
Anodizing Surface ALD images before / after coatin
  • Anodizing
  • + ALD 100nm
  • Plate ALD Results
  • 300mm ALD system
  • 6G ALD system
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