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Liquid Mass Flow Controller

Liquid Mass Flow Controller

Ultra-low flow rate control in microliters (min. 0.01ml/min)
The flow meter provides fine flow control and can accurately measure even small flow rates, starting from 0.01ml/min.
Precise flow control of low-boiling and high-viscosity liquids
In semiconductor manufacturing processes, various liquids are used to precisely control different flow properties.
Minimize ambient temperature impact
The influence of ambient temperature changes on flow measurement is minimized, maintaining accuracy within 1% at ambient temperatures of 15-50℃.
  • Specification
    Model HLM-100K
    Flow Range 0~20g/min
    Controllable range 5 ~ 100%F.S.
    Liquid All liquids except those corrosive to stainless steel( ex. HCl, HF)
    Accuracy ±1%F.S.
    Linearity ±0.5%F.S.
    Repeatability ±0.5%F.S.
    Input/output signal Analog : Input/output 0~5VDC, Digital : RS485 Serial
Liquid Mass Flow Controller
Liquid Mass Flow Controller
info
Ultra-low flow rate control in microliters (min. 0.01ml/min)
The flow meter provides fine flow control and can accurately measure even small flow rates, starting from 0.01ml/min.
Precise flow control of low-boiling and high-viscosity liquids
In semiconductor manufacturing processes, various liquids are used to precisely control different flow properties.
Minimize ambient temperature impact
The influence of ambient temperature changes on flow measurement is minimized, maintaining accuracy within 1% at ambient temperatures of 15-50℃.
  • Specification
    Model HLM-100K
    Flow Range 0~20g/min
    Controllable range 5 ~ 100%F.S.
    Liquid All liquids except those corrosive to stainless steel( ex. HCl, HF)
    Accuracy ±1%F.S.
    Linearity ±0.5%F.S.
    Repeatability ±0.5%F.S.
    Input/output signal Analog : Input/output 0~5VDC, Digital : RS485 Serial
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