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- Thermal Fluid
- Liquid Mass Flow Controller
- Ultra-low flow rate control in microliters (min. 0.01ml/min)
- The flow meter provides fine flow control and can accurately measure even small flow rates, starting from 0.01ml/min.
- Precise flow control of low-boiling and high-viscosity liquids
- In semiconductor manufacturing processes, various liquids are used to precisely control different flow properties.
- Minimize ambient temperature impact
- The influence of ambient temperature changes on flow measurement is minimized, maintaining accuracy within 1% at ambient temperatures of 15-50℃.
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Specification Model HLM-100K Flow Range 0~20g/min Controllable range 5 ~ 100%F.S. Liquid All liquids except those corrosive to stainless steel( ex. HCl, HF) Accuracy ±1%F.S. Linearity ±0.5%F.S. Repeatability ±0.5%F.S. Input/output signal Analog : Input/output 0~5VDC, Digital : RS485 Serial
- Liquid Mass Flow Controller
- info
- Ultra-low flow rate control in microliters (min. 0.01ml/min)
- The flow meter provides fine flow control and can accurately measure even small flow rates, starting from 0.01ml/min.
- Precise flow control of low-boiling and high-viscosity liquids
- In semiconductor manufacturing processes, various liquids are used to precisely control different flow properties.
- Minimize ambient temperature impact
- The influence of ambient temperature changes on flow measurement is minimized, maintaining accuracy within 1% at ambient temperatures of 15-50℃.
-
Specification Model HLM-100K Flow Range 0~20g/min Controllable range 5 ~ 100%F.S. Liquid All liquids except those corrosive to stainless steel( ex. HCl, HF) Accuracy ±1%F.S. Linearity ±0.5%F.S. Repeatability ±0.5%F.S. Input/output signal Analog : Input/output 0~5VDC, Digital : RS485 Serial
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