Home > Our Products > Heater Product
AlN Parts
■ Plate / Ring
■ Wafer Tray / Cover



AlN 제조 공정
■ 원료 Mixing -> Drying -> Calcinations -> Forming
-> Sintering -> Machine -> Inspectoins -> Packing



AlN Heater
■ Type : 300mm / 고온용
■ Meterial : AlN
■ Color : Gray
■ Heater : MO, Coil Type
■ RF Sheath : MO, Mesh Type
■ Heater Zone : 2 Zone
■ Shaft : All-in-one
■ Max Using Temp : 800℃(in low vacuum)
■ Ramping rate : 8 ℃/min
■ TC wafer temp : 720℃ (in low vacuum)
■ Temp. deviation : ΔT = ± 5℃ (at 700℃)
■ Electric properties : 208V, 4.5Ω, 46.2A, 9.6Kw
■ Comment : Customize design